除尘系统(Dust removal system)

处理原理(Processing principle)

      含尘废气从顶端进入集尘机，重力和惯性力使得颗粒较粗大的尘粒下沉落入灰斗，颗粒细小的尘粒在经过滤筒时，沉积附着在滤筒滤料表面，通过吹扫落入灰斗。除尘后的废气经一次风机抽送至三段式洗涤塔，经氧化、还原、碱洗处理以去除NOx、氟化物等废气成分，处理达标后的洁净气体再经二次风机抽排至烟囱，排放至大气环境。

     Dust containing exhaust gas enters the dust collector from the top, and gravity and inertia forces cause larger particles to sink into the ash hopper. Small particles of dust, when passing through the filter cartridge, deposit and adhere to the surface of the filter material, and then fall into the ash hopper through blowing. The exhaust gas after dust removal is pumped to a three-stage washing tower by a primary fan. It is treated by oxidation, reduction, and alkaline washing to remove NOx, fluoride, and other waste gas components. The clean gas that meets the standards is then pumped to the chimney by a secondary fan and discharged into the atmospheric environment.

适用废气(Applicable exhaust gas)

     电子半导体等行业在化学气相沉积（CVD）、干蚀刻、扩散、离子植入及磊晶等制程时产生的粉尘、NOx、氟化物等有污染物气体。

     Dust generated during processes such as chemical vapor deposition (CVD), dry etching, diffusion, ion implantation, and epitaxy in electronic and semiconductor industries NOx、 Gases containing pollutants such as fluoride.

应用领域(Application area)

     复合材料制备、微电子学工艺、半导体光电技术、太阳能利用、光纤通信、超子导技术。

   Composite material preparation, microelectronics technology, semiconductor optoelectronics technology, solar energy utilization, fiber optic communication, and superconducting technology.