剥离液系统

Stripper system

处理原理(Processing principle)

       剥离液废气在前端洁净室内,经冷凝器中的初效滤网拦截粒径10μm以上的杂质,拦截效率为99%;再经深度过度器处理,将冷凝处理后的混合气体通过烛式滤筒进行深度过滤,对粒径2μm以上的液滴进行拦截(拦截率在率在99%以上);集成至屋面主集管的剥离液废气再经洗涤塔做相应处理并除雾,处理后达标的废气由风机抽排至烟囱,再排放于大气环境中。

       Stripping liquid waste gas is in the front-end clean room, and the primary filter in the condenser intercepts impurities with a particle size of more than 10 μm, and the interception efficiency is 99%; then it is processed by a deep exciter, and the condensed mixed gas is passed through the candle filter The cartridge performs deep filtration to intercept droplets with a particle size of more than 2μm (the interception rate is above 99%); the stripping liquid waste gas integrated into the main header of the roof is then treated and defogged by the washing tower. After treatment, the waste gas reaching the standard is pumped out to the chimney by the fan and then discharged into the atmospheric environment.

 

适用废气(Applicable exhaust gas)

     剥离液废气中的有害成分包含N-Methylformamide、Diethyleneglycol-t-butylether、乙醇胺等。

     Stripping liquid exhaust gas include N-Methylformamide, Diethyleneglycol-t-butylether, ethanolamine, etc.

应用领域( Application field)

     集成电路、分立器件、显示面板、太阳能电池等生产湿法工艺制造。

      Integrated circuits, discrete devices, display panels, solar cells, etc. are manufactured by wet process.

系统方案

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